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    • ArF lithography machine

    Insights

    2024-09-19

    [Insights] China’s MIIT Unveils Latest Domestic DUV Equipment, Faces Challenges for 40nm Processes

    Semiconductors

    On September 9, 2024, China’s Ministry of Industry and Information Technology (MIIT) released the "Guiding Catalog for the Promotion and Application of Major Technical Equipment (2024 Edition)," listing 286 domestically manufactured equipment items. Among these, the KrF and ArF lithography machine...

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