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As the semiconductor industry continues to advance, it has sparked an arms race among Samsung, Intel, and TSMC in acquiring extreme ultraviolet (EUV) equipment. When asked about when TSMC would adopt the extremely expensive High Numerical Aperture EUV (High-NA EUV) lithography equipment, as per a report from Economic Daily News, TSMC’s Senior Vice President of Business Development and Global Sales at TSMC, Kevin Zhang, also revealed his insight regarding the matter in an interview.
Reportedly, High-NA EUV machines are priced as high as USD 380 million each, more than double the cost of regular EUV machines. Samsung and Intel have already invested heavily, purchasing several High-NA EUV machines ahead of TSMC, hoping to gain a competitive edge through more advanced equipment.
Industry sources cited by the report point out that Kevin Zhang did not reveal the exact timeline for TSMC’s purchase of High-NA EUV, indicating that TSMC is confident and will not blindly expand its procurement just because competitors have made early purchases. Instead, TSMC will continue to strategically plan its advanced manufacturing processes, steadily preparing to meet upcoming challenges.
Youtube channel TechTechPotato recently uploaded a 29-minute interview with Kevin Zhang. During the interview, Zhang emphasized that TSMC was the very first in terms of bringing EUV into high-volume manufacturing as early as the 7nm generation.
Zhang pointed out that TSMC currently leads in the usage, mass production, and production efficiency of EUV technology. Zhang also mentioned that scalability and manufacturing costs are significant factors to consider. He believes that TSMC’s R&D team will make the best decision regarding when and where to apply the next generation of EUV technology.
Notably, according to a report from The Chosun Daily, it pointed out that TSMC was expected to maximize the capabilities of its existing EUV equipment and utilize them through multi-patterning techniques. Simultaneously, the company was also evaluating the scale at which additional equipment may be introduced.
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With the U.S.-China tech war heating up as the U.S. election approaches, industry sources cited by the Economic Daily News report that Chinese IC design companies are rushing to place more orders with TSMC for chip production using advanced processes before the U.S. potentially imposes stricter control policies. At the same time, they are initiating a backup plan by shifting orders to Samsung for chips manufactured with advanced nodes to avoid potential future U.S. bans on Chinese companies using Taiwanese foundries.
As a result, Samsung is becoming a beneficiary of the escalating U.S.-China tech conflict, sparking a new round of competition for orders with TSMC. As of the deadline for this report, TSMC has not responded to these rumors.
Per TSMC’s second-quarter financial report, the revenue proportion from China increased significantly from 9% in the first quarter to 16% in the second quarter. This surpasses other Asia-Pacific regions, making China the second-largest source of revenue after North America, which accounts for 65%.
The same report cites sources indicating that the increase in TSMC’s revenue share from China last quarter is likely due to Chinese IC design companies sensing potential future U.S. pressure that could prevent them from placing orders with TSMC.
As a result, these companies have been placing larger orders in advance to stockpile chips, similar to the situation previously seen when Huawei’s HiSilicon placed massive orders with TSMC to stockpile chips just before being blacklisted by the U.S.
It is understood that although the related Chinese IC companies may not using the most advanced processes, they are employing relatively advanced processes, which have been developed over several years, and applied in areas such as ADAS, mobile phones, and high-speed computing. Recently, these customers have continued to place orders with TSMC and have also begun evaluating backup plan, which involves switching orders to Samsung.
Sources cited by the report also pointed out that while Chinese IC design houses would like to diversify risks regarding the relatively advanced nodes by placing orders with companies other than TSMC, they may not be allowed to collaborate with Intel. This is why Samsung may emerge as an option.
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As SK hynix and Samsung are releasing their financial results on July 25th and July 31st, respectively, their progress on HBM3 and HBM3e have also been brought into spotlight. Earlier this week, Samsung is said to eventually passed NVIDIA’s qualification tests for its HBM3 chips. While the Big Three in the memory sector are now almost on the same page, the war between HBM3/ HBM3e is expected to intensify in the second half of 2024.
Samsung Takes a Big Leap
According to reports from Reuters and the Korea Economic Daily, Samsung’s HBM3 chips have been cleared by NVIDIA, which will initially be used exclusively in the AI giant’s H20, a less advanced GPU tailored for the Chinese market. Citing sources familiar with the matter, the reports note that Samsung may begin supplying HBM3 to NVIDIA as early as August.
However, as the U.S. is reportedly considering to implement new trade sanctions on China in October, looking to further limit China’s access to advanced AI chip technology, NVIDIA’s HGX-H20 AI GPUs might face a sales ban. Whether and to what extent would Samsung’s momentum be impacted remains to be seen.
SK hynix Eyes HBM3e to Account > 50% of Total HBM Shipments
SK hynix, as the current HBM market leader, has expressed its optimism in securing the throne on HBM3. According to a report by Business Korea, citing Kim Woo-hyun, vice president and chief financial officer of SK hynix, the company significantly expanded its HBM3e shipments in the second quarter as demand surged.
Moreover, SK hynix reportedly expects its HBM3e shipments to surpass those of HBM3 in the third quarter, with HBM3e accounting for more than half of the total HBM shipments in 2024.
SK hynix started mass production of the 8-layer HBM3e for NVIDIA in March, and now it is also confident about the progress on the 12-layer HBM3e. According to Business Korea, the company expects to begin supplying 12-layer HBM3e products to its customers in the fourth quarter. In addition, it projects the supply of 12-layer products to surpass that of 8-layer products in the first half of 2025.
Micron Expands at Full Throttle
Micron, on the other hand, has reportedly started mass production of 8-layer HBM3e in February, according to a previous report from Korea Joongang Daily. The company is also reportedly planning to complete preparations for mass production of 12-layer HBM3e in the second half and supply it to major customers like NVIDIA in 2025.
Targeting to achieve a 20% to 25% market share in HBM by 2025, Micron is said to be building a pilot production line for HBM in the U.S. and is considering producing HBM in Malaysia for the first time to capture more demand from the AI boom, a report by Nikkei notes. Micron’s largest HBM production facility is located in Taichung, Taiwan, where expansion efforts are also underway.
Earlier in May, a report from a Japanese media outlet The Daily Industrial News also indicated that Micron planned to build a new DRAM plant in Hiroshima, with construction scheduled to begin in early 2026 and aiming for completion of plant buildings and first tool-in by the end of 2027.
TrendForce’s latest report on the memory industry reveals that DRAM revenue is expected to see significant increases of 75% in 2024, driven by the rise of high-value products like HBM. As the market keeps booming, would Samsung come from behind and take the lead in the HBM3e battle ground? Or would SK hynix defend its throne? The progress of 12-layer HBM3e may be a key factor to watch.
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Amid the wave of AI applications, the demand for high-performance memory continues to mushroom, with DRAM, represented by HBM, gaining significant traction. Meanwhile, to further meet market demand, memory manufacturers are poised to embrace a new round of DRAM technological “revolution.”
According to a report from Korean media outlet Chosun Biz, Samsung Electronics Vice President Changsik Yoo recently announced that Samsung’s next-generation DRAM technology is progressing well. In addition to the successful mass production of 1b DRAM, the development of 4F Square DRAM technology is also proceeding smoothly, with the initial sample of 4F Square DRAM set to be developed by 2025.
Industry sources cited by WeChat account DRAMeXchange indicate that the early DRAM cell structure was 8F Square, while currently commercialized DRAM mainly uses 6F Square. Compared to these two technologies, 4F Square employs a vertical channel transistor (VCT) structure, which can reduce the chip surface area by 30%.
As the cell area decreases, DRAM density and performance increase. Therefore, driven by applications like AI, 4F Square technology is gradually sought after by major storage manufacturers.
Previously, Samsung stated that many companies are working to transition their technology to 4F Square VCT DRAM, although some challenges need to be overcome, including the development of new materials like oxide channel materials and ferroelectrics.
Industry sources believe that the initial sample of Samsung’s 4F Square DRAM in 2025 might be for internal release. Another semiconductor manufacturer, Tokyo Electron, estimates that DRAM using VCT and 4F Square technology will come out between 2027 and 2028.
Furthermore, earlier media reports mentioned that Samsung plans to apply Hybrid Bonding technology to support the production of 4F Square DRAM. Hybrid Bonding is a next-generation packaging technology referring to vertically stack chips to increase cell density and thus improve performance, which will also exert an influence on the development of HBM4 and 3D DRAM.
In the era of AI, HBM, particularly HBM3e, has thrived in the memory market, prompting fierce competition among the three major DRAM manufacturers. A new race is now underway, primarily focusing on the next-generation HBM4 technology.
In April of this year, SK Hynix announced a partnership with TSMC to jointly develop HBM4. It is reported that the two companies will first work on performance improvements for the base die fitted at the bottom layer within the HBM package. To focus on the development of next-generation HBM4 technology, Samsung has established a new “HBM Development Team.”
In July, Choi Jang-seok, head of the New Business Planning Group in Samsung Electronics’ memory division, revealed that the company is developing a high-capacity HBM4 memory with a single stack of up to 48GB, expected to go into production next year. Recently, Samsung reportedly plans to use a 4nm advanced process to produce HBM4 logic die. Micron, on the other hand, plans to introduce HBM4 between 2025 and 2027 and transition to HBM4E by 2028.
Aside from manufacturing processes, DRAM manufacturers are actively exploring hybrid bonding technology for future HBM products. Compared to existing bonding processes, hybrid bonding eliminates the need for bumps between DRAM memory layers, instead directly connecting the upper and lower layers, copper to copper. This significantly improves signal transmission speed, better matching the high bandwidth requirements of AI computing.
In April of this year, Korean media outlet The Elec reported that Samsung successfully manufactured a 16-layer stacked HBM3 memory based on hybrid bonding technology, with the memory sample functioning normally. This 16-layer stacked hybrid bonding technology will be used to produce HBM4 at scale in the future. SK Hynix plans to adopt hybrid bonding in its HBM production by 2026. Micron is also developing HBM4 and is considering related technologies, including hybrid bonding, which are all under research at present.
3D DRAM (Three-dimensional dynamic random-access memory) represents a new DRAM technology with a novel memory cell structure. Unlike traditional DRAM, which places memory cells horizontally, 3D DRAM vertically stacks memory cells, greatly increasing storage capacity per unit area and improving efficiency. This makes it a key development for the next generation of DRAM.
In the memory market, 3D NAND Flash has already achieved commercial application, while 3D DRAM technology is still under research and development. However, as AI, big data, and other applications enjoy burgeoning growth, the demand for high-capacity, high-performance memory will surge, and 3D DRAM is expected to become a mainstream product in the memory market.
HBM technology has paved the way for the 3D evolution of DRAM, enabling DRAM to transition from traditional 2D to 3D. However, current HBM cannot be considered as true 3D DRAM technology. Samsung’s 4F Square VCT DRAM is closer to the concept of 3D DRAM, but it is not the only direction or goal for 3D DRAM. Memory manufacturers have more ideas and creativity in 3D DRAM.
Samsung plans to achieve the commercialization of 3D DRAM by 2030. In 2024, Samsung showcased two 3D DRAM technologies, including VCT and stacked DRAM. Samsung first introduced VCT technology, then upgraded to stacked DRAM by stacking multiple VCTs together to continuously improve DRAM capacity and performance.
Samsung states that stacked DRAM can fully utilize the Z-axis space, accommodating more memory cells in a smaller area, with a single chip capacity exceeding 100Gb. In May of this year, Samsung noted that it, along with other companies, successfully manufactured 16-layer 3D DRAM, but emphasized that it is not ready for mass production. 3D DRAM is expected to be produced using wafer-to-wafer hybrid bonding technology, and BSPDN (Backside Power Delivery Network) technology is also considered.
Regarding Micron, industry sources cited by DRAMeXchange reveal that Micron has filed for a 3D DRAM patent application different from Samsung’s, aiming to alter the shape of transistors and capacitors without placing cells.
BusinessKorea reported in June that SK Hynix achieved a manufacturing yield of 56.1% for its 5-layer stacked 3D DRAM. This means that out of around 1000 3D DRAMs produced on a single test wafer, about 561 viable devices were manufactured. The experimental 3D DRAM demonstrated characteristics similar to the currently used 2D DRAM, marking the first time SK Hynix disclosed specific numbers and features of its 3D DRAM development.
Besides, American company NEO Semiconductor is also engaging in the development of 3D DRAM. Last year, NEO Semiconductor announced the launch of the world’s first 3D DRAM prototype: 3D X-DRAM. This technology resembles 3D NAND Flash, namely increasing memory capacity by stacking layers, offering high yield, low cost, and remarkably high density.
NEO Semiconductor plans to launch the first generation of 3D X-DRAM in 2025, featuring a 230-layer stack and a core capacity of 128Gb, which is several times higher than the 16Gb capacity of 2D DRAM.
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As the industry is entering the Angstrom era with semiconductor giants eagerly applying EUV machines to the advanced nodes, more details about Samsung’s 2nm have surfaced. According to the latest report by TheElec, Samsung’s 2nm process will feature 30% more extreme ultraviolet (EUV) layers than the 3nm node.
The report notes that Samsung’s 3nm node has 20 EUV mask layers, while the layers of the 2nm node will be increased to late-20. As the cost of manufacturing rises with the number of EUV mask layers, whether the wafer average selling price of Samsung’s 2nm will significantly increase attracts attention.
According to the report, the South Korean semiconductor giant first implemented EUV technology in its logic process nodes with 7nm in 2018. Since then, Samsung has increased the number of EUV layers or process steps with each subsequent node, moving from 5nm to 3nm. The report also states that Samsung’s 1.4nm process, set to begin production in 2027, is expected to feature over 30 EUV layers.
Meanwhile, Samsung is also using EUV in its DRAM production. For its Gen 6 10nm DRAM, Samsung has implemented up to 7 EUV layers, compared to 5 layers used by SK Hynix, TheElec states.
In comparison, according to an earlier report by AnandTech, TSMC’s standard N3 node includes up to 25 EUV layers. TSMC employs EUV double-patterning on some of these layers to achieve greater logic and SRAM transistor density compared to its N5 node.
It is also worth noting that as EUV layers increase with each node, foundries are vying to secure more EUV machines from ASML. The Dutch lithography equipment giant is said to ship over 70 EUV machines to TSMC in 2024 and 2025 in response to the strong demand of 2nm and 3nm, according to a report by MoneyDJ.
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(Photo credit: ASML)